Publications

Publications:

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On Processes and Materials

Kirt R. Williams, Kishan Gupta, and Matthew Wasilik, “Etch Rates for Micromachining Processing—Part II,” Journal of Microelectromechanical Systems, vol. 12, no. 6, Dec. 2003, pp. 761-778. Abstract . . . PDF paper ©2003 IEEE. . . PDF table of data

Kirt R. Williams and Richard S. Muller, "Etch Rates for Micromachining Processing," Journal of Microelectromechanical Systems, vol. 5, no. 4, Dec. 1996, pp. 256-269. Abstract . . . PDF paper ©1996 IEEE. . . PDF table of data

Kirt R. Williams, "Etching for Micromachining Processing," Electronics Research Laboratory, College of Engineering, U.C. Berkeley, Memorandum No. UCB/ERL M96/37, rev. 29 July 1996. Abstract and contents

K. R. Williams, “Etching of Single-Crystal Silicon,” Chapter 16 of Properties of Crystalline Silicon, Robert Hull, editor, INSPEC/IEE, 1999. Summary at IEE/EMIS. . . at Amazon

Kirt R. Williams, "New Technology and Applications at Lucas NovaSensor," Tribology Issues and Opportunities in MEMS, Nov. 1997, pp. 121-134. Abstract . . . Summary at Springer/Kluwer. . . at Amazon

On Devices and Systems

Nadim Maluf and Kirt Williams, An Introduction to Microelectromechanical Systems Engineering, 2nd Edition, Artech House, Boston, July 2004. Summary at Artech House and sample chapter. . . at Amazon

Kirt R. Williams, Dirk P. H. De Bruyker, Scott J. Limb, Eric M. Amendt, and Doug A. Overland, "Vacuum Steered-Electron Electric-Field Sensor," Journal of Microelectromechanical Systems, July 15, 2013. Abstract . . . Paper

Storrs Hoen, Qing Bai, Jonah A. Harley, David A. Horsley, Farid Matta, Tracy Verhoeven, Judy Williams, and Kirt R. Williams, “A High Performance Dipole Surface Drive for Large Travel and Force,” Tech. Dig. Transducers ’03, June 2003. pp. 344-347. Abstract

Kirt R. Williams, Tom A. Kwa, Izzat I. Taher, and Nadim I. Maluf, “Proportional Control of Refrigerant and Other Fluids with a Silicon Micromachined Valve,” Proceedings of Appliance Manufacturer Conference & Expo, Cincinnati, OH, Sep. 11-13, 2000. Abstract

Kirt R. Williams, Nadim I. Maluf, E. Nelson Fuller, Richard J. Barron, Dominik P. Jaeggi, and Bert P. van Drieënhuizen, “A Silicon Microvalve for the Proportional Control of Fluids,” Digest of the 10th International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, June 1999, pp. 1804-1807. Abstract . . . Paper

B. L. Gray, D. Jaeggi, N. J. Mourlas, B. P. van Drieënhuizen, K. R. Williams, N. I. Maluf, and G. T. A. Kovacs, “Novel Interconnection Technologies for Integrated Microfluidic Systems,” Sensors and Actuators A, vol. 77, 1999, pp. 57-65. Also in Hilton Head '98, pp. 112-115. Abstract

Kirt Reed Williams, "Micromachined Hot-Filament Vacuum Devices," Ph.D dissertation, Electrical Engineering and Computer Sciences, 1997 Abstract . . . At abstract service . . . Full dissertation (Zipped PDFs) . . . Another location (Web archive)

"Micromachined Hot-Filament Ionization Pressure Sensor and Magnetometer," Transducers '97, pp. 1249-1252. Abstract . . . PDF conference paper

Patents

Kirt R. Williams, “Micromachined Parallel-Plate Variable Capacitor with Plate Suspension,” U.S. Patent 6,549,394, April 15, 2003. Patent

Nadim I. Maluf, Kirt R. Williams, Bert P. van Drieënhuizen, E. Nelson Fuller, Richard J. Barron, “Proportional Micromechanical Device,” World Patent WO0014415, March 16, 2000; U.S. Patent 6,761,420, July 13, 2004. Patent

Kirt R. Williams, Bert P. van Drieënhuizen, Domenik P. Jaeggi, Nadim I. Maluf, Edward N. Fuller, Richard J. Barron, “Microvalve with Pressure Equalization,” U.S. Patent 6,523,560, Feb. 25, 2003. Patent

Richard S. Muller, Carlos H. Mastrangelo, and Kirt R. Williams, “Sealed Micromachined Vacuum and Gas Filled Devices,” U. S. Patent 5,493,177, Feb. 20, 1996; World Patent WO9512211, May 4, 1995. Patent

List of physical constants and conversion factors