"Micromachined Hot-Filament Ionization Pressure Sensor and Magnetometer,"
Kirt R. Williams and Richard S. Muller,
1997 International Conference on Solid-State Sensors and Actuators 
(Transducers '97), pp. 1249-1252


Micromachined Hot-Filament Ionization Pressure Sensor and Magnetometer

Abstract

Two new micromachined sensors, 
an ionization pressure sensor (ion gauge) and magnetic-field sensor, 
were fabricated and tested.  
Both sensors employ electrons thermionically emitted 
from a hot tungsten filament for sensing 
and are built using the same fabrication process.