A HIGH-PERFORMANCE DIPOLE SURFACE DRIVE FOR LARGE TRAVEL AND FORCE
Storrs Hoen, Qing Bai, Jonah A. Harley, David A. Horsley, Farid Matta, 
Tracy Verhoeven, Judy Williams, and Kirt  R. Williams

Tech. Dig. Transducers '03, June 2003. pp. 344-347.

ABSTRACT
We report unparalleled travel, force, precision and repeatability with
an electrostatically actuated dipole surface drive.  We have successfully 
demonstrated motors that generate several hundred micronewtons while 
traveling 50 microns at 60 V.  The motors can be positioned with nanometer 
resolution and open-loop repeatability.  The manufacture of these motors 
uses a two-level polysilicon deposition, a wafer bond and two anisotropic 
deep silicon etches.